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Elucidating the role of imaging metrics for variability and after etch defectivity
Publication:
Elucidating the role of imaging metrics for variability and after etch defectivity
Date
2022
Journal article
https://doi.org/10.1117/1.JMM.21.2.023201
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2.35 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franke, Joern-Holger
;
Frommhold, Andreas
;
Dauendorffer, Arnaud
;
Nafus, Kathleen
;
Rispens, Gijsbert
;
Maslow, Mark
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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231
since deposited on 2022-08-12
Acq. date: 2025-10-24
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1419
since deposited on 2022-08-12
Acq. date: 2025-10-24
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Metrics
Downloads
231
since deposited on 2022-08-12
Acq. date: 2025-10-24
Views
1419
since deposited on 2022-08-12
Acq. date: 2025-10-24
Citations