Publication:

Elucidating the role of imaging metrics for variability and after etch defectivity

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.2.023201
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Published version 2.35 MB

Author(s)

Franke, Joern-Holger
;
Frommhold, Andreas  
;
Dauendorffer, Arnaud
;
Nafus, Kathleen
;
Rispens, Gijsbert
;
Maslow, Mark

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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231 since deposited on 2022-08-12
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1419 since deposited on 2022-08-12
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231 since deposited on 2022-08-12
Acq. date: 2025-10-24

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1419 since deposited on 2022-08-12
Acq. date: 2025-10-24

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