Publication:

Elucidating the role of imaging metrics for variability and after etch defectivity

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.2.023201
Simple item page Full metadata Statistics
 
dc.contributor.authorFranke, Joern-Holger
dc.contributor.authorFrommhold, Andreas
dc.contributor.authorDauendorffer, Arnaud
dc.contributor.authorNafus, Kathleen
dc.contributor.authorRispens, Gijsbert
dc.contributor.authorMaslow, Mark
dc.contributor.imecauthorFranke, Joern-Holger
dc.contributor.imecauthorFrommhold, Andreas
dc.contributor.orcidimecFranke, Joern-Holger::0000-0002-3571-1633
dc.contributor.orcidimecFrommhold, Andreas::0000-0001-6824-5643
dc.date.accessioned2023-03-17T09:10:35Z
dc.date.available2022-08-12T02:39:08Z
dc.date.available2023-03-17T09:10:35Z
dc.date.embargo2023-05-30
dc.date.issued2022
dc.identifier.doi10.1117/1.JMM.21.2.023201
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40251
dc.publisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpageArt. 023201
dc.source.endpagena
dc.source.issue2
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages13
dc.source.volume21
dc.title

Elucidating the role of imaging metrics for variability and after etch defectivity

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
023201_1.pdf
Size:
2.35 MB
Format:
Adobe Portable Document Format
Description:
Published version
Download
Publication available in collections:
Articles