Publication:

Meeting the doping challenges of device scaling

Date

2007

Journal article

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Author(s)

Vandervorst, Wilfried

;

;

;

del Agua Borniquel, Jose Ignacio

;

Porshnev, Peter

;

Everaert, Jean-Luc

;

Journal

Nanochip Technology Journal

Statistics

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Acq. date: 2026-04-05