Publication:

Meeting the doping challenges of device scaling

Date

2007
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJurczak, Gosia
dc.contributor.authorFoad, Majeed
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorPorshnev, Peter
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorPoon, Tze
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.imecauthorEveraert, Jean-Luc
dc.date.accessioned2021-10-16T21:05:45Z
dc.date.available2021-10-16T21:05:45Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13127
dc.source.beginpage2
dc.source.endpage5
dc.source.issue1
dc.source.journalNanochip Technology Journal
dc.source.volume5
dc.title

Meeting the doping challenges of device scaling

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles