Engineering the IIIV gate stack properties by optimization of the ALD process

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Author(s)

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Ivanov, Tsvetan

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Delabie, Annelies

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Givens, Michael

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Van Elshocht, Sven

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Holsteyns, Frank

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Collaert, Nadine

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De Gendt, Stefan

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1957 since deposited on 2021-10-22

Acq. date: 2025-10-23