Publication:

Engineering the IIIV gate stack properties by optimization of the ALD process

Date

2014
Meeting abstract
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Author(s)

Sioncke, Sonja
;
Ivanov, Tsvetan  
;
Lin, Dennis  
;
Franco, Jacopo  
;
Vais, Abhitosh  
;
Ameen, Mahmoud
;
Delabie, Annelies  
;
Xie, Qi  
;
Maes, Jan  
;
Givens, Michael  
;
Tang, Fu
;
Van Elshocht, Sven  
;
Holsteyns, Frank  
;
Barla, Kathy  
;
Collaert, Nadine  
;
Thean, Aaron  
;
De Gendt, Stefan  
;
Heyns, Marc  

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Abstract

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