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Engineering the IIIV gate stack properties by optimization of the ALD process

Date

2014
Meeting abstract
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dc.contributor.authorSioncke, Sonja
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorLin, Dennis
dc.contributor.authorFranco, Jacopo
dc.contributor.authorVais, Abhitosh
dc.contributor.authorAmeen, Mahmoud
dc.contributor.authorDelabie, Annelies
dc.contributor.authorXie, Qi
dc.contributor.authorMaes, Jan
dc.contributor.authorGivens, Michael
dc.contributor.authorTang, Fu
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorBarla, Kathy
dc.contributor.authorCollaert, Nadine
dc.contributor.authorThean, Aaron
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorVais, Abhitosh
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorGivens, Michael
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecVais, Abhitosh::0000-0002-0317-7720
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-22T05:55:50Z
dc.date.available2021-10-22T05:55:50Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24537
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2014-02/30/1613.abstract
dc.source.beginpage1613
dc.source.conference226th ECS Fall Meeting
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.title

Engineering the IIIV gate stack properties by optimization of the ALD process

dc.typeMeeting abstract
dspace.entity.typePublication
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