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Exploring the ALD Al2O3/ In0.53Ga0.47As and Al2O3/Ge interface properties: a common gate stack approach for advanced III-V/Ge CMOS

Date

2010
Proceedings Paper
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dc.contributor.authorLin, Dennis
dc.contributor.authorWaldron, Niamh
dc.contributor.authorBrammertz, Guy
dc.contributor.authorMartens, Koen
dc.contributor.authorWang, Wei-E
dc.contributor.authorSioncke, Sonja
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorTseng, W.H.
dc.contributor.authorLin, S.C.
dc.contributor.authorTemst, K.
dc.contributor.authorVantomme, Andre
dc.contributor.authorMitard, Jerome
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-18T18:20:00Z
dc.date.available2021-10-18T18:20:00Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17499
dc.source.beginpage173
dc.source.conferenceGraphene, Ge/III-V, and Emerging Materials for Post-CMOS Applications 2
dc.source.conferencedate25/04/2010
dc.source.conferencelocationVancouver Canada
dc.source.endpage183
dc.title

Exploring the ALD Al2O3/ In0.53Ga0.47As and Al2O3/Ge interface properties: a common gate stack approach for advanced III-V/Ge CMOS

dc.typeProceedings paper
dspace.entity.typePublication
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