Voltage ramp stress based lifetime-prediction model of advanced Al-doped HfO2 dielectric for 2.5D MIMCAPs

dc.contributor.author	Fohn, Corinna
dc.contributor.author	Chery, Emmanuel
dc.contributor.author	Croes, Kristof
dc.contributor.author	Stucchi, Michele
dc.contributor.author	Afanasiev, Valeri
dc.contributor.imecauthor	Fohn, Corinna
dc.contributor.imecauthor	Chery, Emmanuel
dc.contributor.imecauthor	Croes, Kristof
dc.contributor.imecauthor	Stucchi, Michele
dc.contributor.imecauthor	Afanasiev, Valeri
dc.contributor.orcidimec	Fohn, Corinna::0000-0002-6182-0147
dc.contributor.orcidimec	Chery, Emmanuel::0000-0002-2526-3873
dc.contributor.orcidimec	Croes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimec	Stucchi, Michele::0000-0002-7848-0492
dc.contributor.orcidimec	Afanasiev, Valeri::0000-0001-5018-4539
dc.date.accessioned	2024-08-06T08:38:57Z
dc.date.available	2024-03-07T17:40:27Z
dc.date.available	2024-08-06T08:38:57Z
dc.date.issued	2024
dc.identifier.doi	10.1016/j.sse.2024.108864
dc.identifier.issn	0038-1101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/43645
dc.publisher	PERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage	Art. 108864
dc.source.endpage	N/A
dc.source.issue	March
dc.source.journal	SOLID-STATE ELECTRONICS
dc.source.numberofpages	4
dc.source.volume	213
dc.subject.keywords	RELIABILITY
dc.title	Voltage ramp stress based lifetime-prediction model of advanced Al-doped HfO2 dielectric for 2.5D MIMCAPs
dc.type	Journal article
dspace.entity.type	Publication
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