Publication:
Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation
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Acq. date: 2026-10-12
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1 since deposited on 2021-09-30
Acq. date: 2026-10-12
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1881 since deposited on 2021-09-30
1last month
1last week
Acq. date: 2026-10-12
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