Publication:

Modeling of bombardment induced oxidation of silicon

Date

2001

Journal article

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Author(s)

De Witte, Hilde

;

Vandervorst, Wilfried

;

Gijbels, Renaat

Journal

Journal of Applied Physics

Metrics

1935 since deposited on 2021-10-14

Acq. date: 2025-12-11