Publication:
Modeling of bombardment induced oxidation of silicon
Date
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Gijbels, Renaat | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T16:48:11Z | |
| dc.date.available | 2021-10-14T16:48:11Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5219 | |
| dc.source.beginpage | 3001 | |
| dc.source.endpage | 3011 | |
| dc.source.issue | 5 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 89 | |
| dc.title | Modeling of bombardment induced oxidation of silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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