Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Publication:

2021

Proceedings Paper

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ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)

1653 since deposited on 2022-04-08

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Acq. date: 2026-01-11