Publication:
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
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1650 since deposited on 2022-04-08
Acq. date: 2025-10-25
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Views
1650 since deposited on 2022-04-08
Acq. date: 2025-10-25
Citations