Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Publication:

2021

Proceedings Paper

Author(s)

;

;

;

;

;

;

;

ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)

1654 since deposited on 2022-04-08

1last month

1last week

Acq. date: 2026-04-28