Publication:

Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

Date

2021
Proceedings Paper
https://doi.org/10.1109/ESSCIRC53450.2021.9567879
Simple item page Full metadata Statistics
 
dc.contributor.authorRawat, Amita
dc.contributor.authorBhuwalka, Krishna
dc.contributor.authorMatagne, Philippe
dc.contributor.authorVermeersch, Bjorn
dc.contributor.authorWu, Hao
dc.contributor.authorHellings, Geert
dc.contributor.authorRyckaert, Julien
dc.contributor.authorLiu, Changze
dc.contributor.imecauthorRawat, Amita
dc.contributor.imecauthorBhuwalka, Krishna
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorVermeersch, Bjorn
dc.contributor.imecauthorWu, Hao
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorLiu, Changze
dc.contributor.orcidimecVermeersch, Bjorn::0000-0001-8640-672X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.date.accessioned2022-04-28T14:33:44Z
dc.date.available2022-04-08T02:10:43Z
dc.date.available2022-04-14T09:51:24Z
dc.date.available2022-04-28T14:33:44Z
dc.date.issued2021
dc.identifier.doi10.1109/ESSCIRC53450.2021.9567879
dc.identifier.eisbn978-1-6654-3751-6
dc.identifier.issn1930-8833
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39598
dc.publisherIEEE
dc.source.beginpage55
dc.source.conference47th IEEE European Solid State Circuits Conference (ESSCIRC)
dc.source.conferencedateSEP 13-22, 2021
dc.source.conferencelocationGrenoble, France
dc.source.endpage58
dc.source.journalESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)
dc.source.numberofpages4
dc.title

Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions