Publication:

Light-induced capacitance alteration for non-destructive open failure localization in 3-D TSV structures

Date

2017
Meeting abstract
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dc.contributor.authorJacobs, Kristof J.P.
dc.contributor.authorKhaled, Ahmad
dc.contributor.authorStucchi, Michele
dc.contributor.authorWang, Teng
dc.contributor.authorGonzalez, Mario
dc.contributor.authorCroes, Kristof
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorJacobs, Kristof J.P.
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecJacobs, Kristof J.P.::0000-0002-1081-3633
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-24T06:11:43Z
dc.date.available2021-10-24T06:11:43Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28577
dc.source.conferenceFraunhofer CAM Workshop
dc.source.conferencedate26/04/2017
dc.source.conferencelocationHalle(Saale) Germany
dc.title

Light-induced capacitance alteration for non-destructive open failure localization in 3-D TSV structures

dc.typeMeeting abstract
dspace.entity.typePublication
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