Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor

dc.contributor.author	Kondoh, Eiichi
dc.contributor.author	Vereecke, Guy
dc.contributor.author	Heyns, Marc
dc.contributor.author	Maex, Karen
dc.contributor.author	Gutt, T.
dc.contributor.imecauthor	Vereecke, Guy
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.imecauthor	Maex, Karen
dc.contributor.orcidimec	Vereecke, Guy::0000-0001-9058-9338
dc.date.accessioned	2021-10-06T11:33:18Z
dc.date.available	2021-10-06T11:33:18Z
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3571
dc.source.beginpage	650
dc.source.endpage	656
dc.source.issue	2
dc.source.journal	J. Vacuum Science and Technology A
dc.source.volume	17
dc.title	Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor
dc.type	Journal article
dspace.entity.type	Publication
Files
Publication available in collections:	Articles

Date