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Zero-energy SIMS: The role of surface roughness development with XeF2 based etching
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Zero-energy SIMS: The role of surface roughness development with XeF2 based etching
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhove, Nico
;
Lievens, Peter
;
Vandervorst, Wilfried
Journal
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1962
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1962
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-10
Citations