Publication:
Zero-energy SIMS: The role of surface roughness development with XeF2 based etching
Date
| dc.contributor.author | Vanhove, Nico | |
| dc.contributor.author | Lievens, Peter | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-18T04:33:34Z | |
| dc.date.available | 2021-10-18T04:33:34Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16444 | |
| dc.source.conference | SIMS XVII | |
| dc.source.conferencedate | 13/09/2009 | |
| dc.source.conferencelocation | Toronto Canada | |
| dc.title | Zero-energy SIMS: The role of surface roughness development with XeF2 based etching | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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