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Development of an electroless copper deposition bath for via fill applications on TiN seed layers
Publication:
Development of an electroless copper deposition bath for via fill applications on TiN seed layers
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Date
1995
Proceedings Paper
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784.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Palmans, Roger
;
Maex, Karen
Journal
Abstract
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2120
since deposited on 2021-09-29
Acq. date: 2025-12-09
Citations
Metrics
Views
2120
since deposited on 2021-09-29
Acq. date: 2025-12-09
Citations