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Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
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1997 since deposited on 2021-10-24
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Acq. date: 2026-03-01
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1997 since deposited on 2021-10-24
1last month
1last week
Acq. date: 2026-03-01
Citations