Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Kwon, DaeSeon; Bizindavyi, Jasper; Parida, Pradyumna Kumar; De, Gourab; Kim, Hyun-Cheol; Richard, Olivier; Favia, Paola; Belmonte, Attilio; Delabie, Annelies; Nyns, Laura; Kar, Gouri Sankar; Van Houdt, Jan; Popovici, Mihaela Ioana

doi:10.1016/j.apsusc.2025.164786

Publication:

Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Date

2026

Journal article

https://doi.org/10.1016/j.apsusc.2025.164786

Simple item page Full metadata Statistics

Author(s)

Kwon, DaeSeon

;

Bizindavyi, Jasper

;

Parida, Pradyumna Kumar

;

;

;

;

;

;

;

;

;

;

Popovici, Mihaela Ioana

Journal

APPLIED SURFACE SCIENCE

Statistics

24 since deposited on 2025-12-19

4last month

Acq. date: 2026-04-05

Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations