Publication:

Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

Date

2026
Journal article
https://doi.org/10.1016/j.apsusc.2025.164786
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dc.contributor.authorKwon, DaeSeon
dc.contributor.authorBizindavyi, Jasper
dc.contributor.authorParida, Pradyumna Kumar
dc.contributor.authorDe, Gourab
dc.contributor.authorKim, Hyun-Cheol
dc.contributor.authorRichard, Olivier
dc.contributor.authorFavia, Paola
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorDelabie, Annelies
dc.contributor.authorNyns, Laura
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorPopovici, Mihaela Ioana
dc.date.accessioned2025-12-19T08:39:49Z
dc.date.available2025-12-19T08:39:49Z
dc.date.createdwos2025-10-25
dc.date.issued2026
dc.identifier.doi10.1016/j.apsusc.2025.164786
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58602
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherELSEVIER
dc.source.beginpage164786
dc.source.issueFebruary
dc.source.journalAPPLIED SURFACE SCIENCE
dc.source.numberofpages12
dc.source.volume717
dc.subject.keywordsMETASTABLE FERROELECTRIC PHASE
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsCAPACITORS
dc.subject.keywordsCHEMISTRY
dc.subject.keywordsENDURANCE
dc.title

Seed layer effect on the phase evolution of the La-doped hafnium zirconium oxide with back-end-of-line compatibility

dc.typeJournal article
dspace.entity.typePublication
imec.internal.crawledAt2025-10-22
imec.internal.sourcecrawler
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