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Metal-barrier induced damage in self-assembly based organosilica low-k dielectrics and its reduction by surfactant residues
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1833 since deposited on 2021-10-25
2last month
Acq. date: 2026-08-24
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Views
1833 since deposited on 2021-10-25
2last month
Acq. date: 2026-08-24
Citations