Publication:

Unsupervised Machine Learning based CD-SEM image segregator for OPC and Process Window Estimation

Date

2020
Proceedings Paper
https://doi.org/10.1117/12.2552055
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Author(s)

Dey, Bappaditya  
;
Cerbu, Dorin  
;
Khalil, Kasem
;
Halder, Sandip  
;
Leray, Philippe  
;
Das, Sayantan  
;
Sherazi, Yasser  
;
Bayoumi, Magdy A.
;
Kim, Ryan Ryoung han

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NA

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282 since deposited on 2021-11-02
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Acq. date: 2026-04-26

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