Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Dissertations
A study of gate oxide damage due to the plasma etching process on sub-0.25μm technology
Publication:
A study of gate oxide damage due to the plasma etching process on sub-0.25μm technology
Copy permalink
Date
1999-12
Dissertation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lee, Hean-Cheal
Journal
Abstract
Description
Metrics
Views
2021
since deposited on 2021-10-14
3
last month
Acq. date: 2025-12-13
Citations
Metrics
Views
2021
since deposited on 2021-10-14
3
last month
Acq. date: 2025-12-13
Citations