Publication:
Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
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1634 since deposited on 2022-09-09
1last month
Acq. date: 2026-04-25
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1634 since deposited on 2022-09-09
1last month
Acq. date: 2026-04-25
Citations