Publication:
Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers
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1636 since deposited on 2022-09-09
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Acq. date: 2026-07-17
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1636 since deposited on 2022-09-09
1last month
1last week
Acq. date: 2026-07-17
Citations