Publication:

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

Date

2021
Proceedings Paper
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dc.contributor.authorMarinins, Aleksandrs
dc.contributor.authorKjellman, Jon
dc.contributor.authorCaer, Charles
dc.contributor.authorKongnyuy, Tangla David
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorSoussan, Philippe
dc.contributor.imecauthorMarinins, Aleksandrs
dc.contributor.imecauthorKjellman, Jon
dc.contributor.imecauthorCaer, Charles
dc.contributor.imecauthorKongnyuy, Tangla David
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecMarinins, Aleksandrs::0000-0002-0728-6684
dc.contributor.orcidimecKjellman, Jon::0000-0002-9073-4344
dc.contributor.orcidimecCaer, Charles::0000-0002-2735-2423
dc.contributor.orcidimecKongnyuy, Tangla David::0000-0001-9063-7555
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.accessioned2022-09-22T12:15:39Z
dc.date.available2022-09-09T02:41:55Z
dc.date.available2022-09-22T12:15:39Z
dc.date.issued2021
dc.identifier.eisbn978-1-943580-91-0
dc.identifier.issn2160-9020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40402
dc.publisherIEEE
dc.source.beginpageSF2A.3
dc.source.conferenceConference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedateMAY 09-14, 2021
dc.source.conferencelocationSan Jose
dc.source.journalna
dc.source.numberofpages2
dc.title

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

dc.typeProceedings paper
dspace.entity.typePublication
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