Publication:

Readying directed self-assembly for patterning in semi-conductor manufacturing

Date

2013

Journal article

Simple item page Full metadata Statistics

Files

28623.pdf 14.72 MB

Author(s)

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Rincon Delgadillo, Paulina

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Van Look, Lieve

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Pollentier, Ivan

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Journal

Journal of Photopolymer Science and Technology

Metrics

1823 since deposited on 2021-10-21

Acq. date: 2025-12-15