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Towards optimization of HV-SSRM for Ge and III-V carrier mapping at the nanometer scale
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Towards optimization of HV-SSRM for Ge and III-V carrier mapping at the nanometer scale
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Schulze, Andreas
;
Clarysse, Trudo
;
Mody, Jay
;
Vandervorst, Wilfried
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1834
since deposited on 2021-10-17
Acq. date: 2025-12-17
Citations
Metrics
Views
1834
since deposited on 2021-10-17
Acq. date: 2025-12-17
Citations