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Towards optimization of HV-SSRM for Ge and III-V carrier mapping at the nanometer scale

Date

2009
Meeting abstract
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dc.contributor.authorEyben, Pierre
dc.contributor.authorSchulze, Andreas
dc.contributor.authorClarysse, Trudo
dc.contributor.authorMody, Jay
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:09:27Z
dc.date.available2021-10-17T22:09:27Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15289
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Towards optimization of HV-SSRM for Ge and III-V carrier mapping at the nanometer scale

dc.typeMeeting abstract
dspace.entity.typePublication
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