Browsing imec Publications by author "O'Neill, Anthony"
Now showing items 1-3 of 3
-
A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
Wilson, Chris; Croes, Kristof; Van Cauwenberghe, Marc; Tokei, Zsolt; Beyer, Gerald; Horsfall, Alton; O'Neill, Anthony (2009) -
Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Beyer, Gerald; Gallacher, Barry; Bull, Steve; Horsfall, Alton; O'Neill, Anthony (2010) -
Reduced self-heating by strained silicon substrate engineering
O'Neill, Anthony; Agaiby, Rimoon; Olsen, Sarah; Yang, Y.; Hellstrom, P.-E.; Ostling, M.; Oehme, M.; Lyutovich, K.; Kasper, E.; Eneman, Geert; Verheyen, Peter; Loo, Roger; Claeys, Cor; Fiegna, C.; Sangiorgi, E. (2008)