Browsing imec Publications by imec author "77e2127b7261c2805534950d8f6a7ff4757a28ea"
Now showing items 1-12 of 12
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Advanced Current-Voltage Model of Electrical Contacts to GaAs- and Ge-Based Active Silicon Photonic Devices
Hsieh, Ping-Yi; O'Sullivan, Barry; Tsiara, Artemisia; Truijen, Brecht; Lagrain, Pieter; Wouters, Lennaert; Yudistira, Didit; Kunert, Bernardette; Van Campenhout, Joris; De Wolf, Ingrid (2023) -
Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Popovici, Mihaela Ioana; Groven, Benjamin; Marcoen, Kristof; Phung, Quan; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; Van den Berg, Jaap; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Gosia; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph (2017) -
First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drain
Mitard, Jerome; Witters, Liesbeth; Arimura, Hiroaki; Sasaki, Yuichiro; Milenin, Alexey; Loo, Roger; Hikavyy, Andriy; Eneman, Geert; Lagrain, Pieter; Mertens, Hans; Sioncke, Sonja; Vrancken, Christa; Bender, Hugo; Barla, Kathy; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine; Thean, Aaron (2014) -
Gate-all-around NWFETs vs. triple-gate FinFETs: junctionless vs. extensionless and conventional junction devices with controlled EWF modulation for multi-VT CMOS
Veloso, Anabela; Hellings, Geert; Cho, Moon Ju; Simoen, Eddy; Devriendt, Katia; Paraschiv, Vasile; Vecchio, Emma; Tao, Zheng; Versluijs, Janko; Souriau, Laurent; Dekkers, Harold; Brus, Stephan; Geypen, Jef; Lagrain, Pieter; Bender, Hugo; Eneman, Geert; Matagne, Philippe; De Keersgieter, An; Fang, W.; Collaert, Nadine; Thean, Aaron (2015) -
Germanium for advanced CMOS transistors: status and trends of this technology
Mitard, Jerome; Witters, Liesbeth; Arimura, Hiroaki; Sasaki, Yuichiro; Milenin, Alexey; Loo, Roger; Hikavyy, Andriy; Eneman, Geert; Lagrain, Pieter; Mertens, Hans; Vrancken, Christa; Bender, Hugo; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine; Thean, Aaron (2015) -
Junctionless gate-all-around lateral and vertical nanowire FETs with simplified processing for advanced logic and analog/RF applications and scaled SRAM cells
Veloso, Anabela; Parvais, Bertrand; Matagne, Philippe; Simoen, Eddy; Huynh Bao, Trong; Paraschiv, Vasile; Vecchio, Emma; Devriendt, Katia; Rosseel, Erik; Ercken, Monique; Chan, BT; Delvaux, Christie; Altamirano Sanchez, Efrain; Versluijs, Janko; Tao, Zheng; Suhard, Samuel; Brus, Stephan; Sibaja-Hernandez, Arturo; Waldron, Niamh; Lagrain, Pieter; Richard, Olivier; Bender, Hugo; Vaisman Chasin, Adrian; Kaczer, Ben; Ivanov, Tsvetan; Ramesh, Siva; De Meyer, Kristin; Ryckaert, Julien; Collaert, Nadine; Thean, Aaron (2016) -
Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts
Firat, Meric; Wouters, Lennaert; Lagrain, Pieter; Haase, Felix; Polzin, Jana-Isabelle; Chaudhary, Aditya; Nogay, Gizem; Desrues, Thibaut; Krugener, Jan; Peibst, Robby; Tous, Loic; Sivaramakrishnan Radhakrishnan, Hariharsudan; Poortmans, Jef (2022) -
Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets
Ramesh, Siva; Ivanov, Tsvetan; Putcha, Vamsi; Alian, AliReza; Sibaja-Hernandez, Arturo; Rooyackers, Rita; Camerotto, Elisabeth; Milenin, Alexey; Pinna, Nicolo; El Kazzi, Salim; Veloso, Anabela; Lin, Dennis; Lagrain, Pieter; Favia, Paola; Collaert, Nadine; De Meyer, Kristin (2017) -
SiGe epitaxially grown in nano-trenches on Si substrate
Richard, Olivier; Vincent, Benjamin; Favia, Paola; Lagrain, Pieter; Bender, Hugo (2013) -
Structural analysis and resistivity measurements of InAs and GaSb fins on 300 mm Si for vertical (T)FET
Mols, Yves; Bogdanowicz, Janusz; Favia, Paola; Lagrain, Pieter; Guo, Weiming; Bender, Hugo; Kunert, Bernardette (2019) -
Understanding the factors affecting contact resistance in nanowire field effect transistors (NWFETs) to improve nanoscale contacts for future scaling
Ramesh, Siva; Ivanov, Tsvetan; Sibaja-Hernandez, Arturo; Alian, AliReza; Camerotto, Elisabeth; Milenin, Alexey; Pinna, Nicolo; El Kazzi, S.; Lin, Dennis; Lagrain, Pieter; Favia, Paola; Bender, Hugo; Collaert, Nadine; De Meyer, K. (2022) -
Vertically stacked gate-all-around Si nanowire transistors: key process optimizations and ring oscillator demonstration
Mertens, Hans; Ritzenthaler, Romain; Pena, Vanessa; Santoro, Gaetano; Kenis, Karine; Schulze, Andreas; Dentoni Litta, Eugenio; Chew, Soon Aik; Devriendt, Katia; Chiarella, Thomas; Demuynck, Steven; Yakimets, Dmitry; Jang, Doyoung; Spessot, Alessio; Eneman, Geert; Dangol, Anish; Lagrain, Pieter; Bender, Hugo; Sun, Shiyu; Korolik, Michael; Kioussis, D.; Kim, Myungsun; Bu, Kyung-Ho; Chen, Shih Chung; Cogorno, Matt; Devrajan, J.; Machillot, Jerome; Yoshida, Naomi; Kim, Namsung; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto (2017)