Authors

Mitard, Jerome; Witters, Liesbeth; Arimura, Hiroaki; Sasaki, Yuichiro; Milenin, Alexey; Loo, Roger; Hikavyy, Andriy; Eneman, Geert; Lagrain, Pieter; Mertens, Hans; Sioncke, Sonja; Vrancken, Christa; Bender, Hugo; Barla, Kathy; Horiguchi, Naoto; Mocuta, Anda; Collaert, Nadine; Thean, Aaron

Conference

IEEE International Electron Devices Meeting - IEDM

Title

First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drain

Publication type

Proceedings paper