Publication:

Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development

Date

2005-06

Journal article

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Author(s)

;

;

Locorotondo, Sabrina

;

Henson, Kirklen

;

;

Paraschiv, Vasile

;

Shamiryan, Denis

;

Jaenen, Patrick

;

Boullart, Werner

;

De Gendt, Stefan

;

Biesemans, Serge

;

Vanhaelemeersch, Serge

;

Vertommen, Johan

;

Coenegrachts, Bart

Journal

Microelectronics Reliability

Statistics

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