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Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development
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Authors
Beckx, Stephan
;
Demand, Marc
;
Locorotondo, Sabrina
;
Henson, Kirklen
;
Claes, Martine
;
Paraschiv, Vasile
;
Shamiryan, Denis
;
Jaenen, Patrick
;
Boullart, Werner
;
De Gendt, Stefan
;
Biesemans, Serge
;
Vanhaelemeersch, Serge
;
Vertommen, Johan
;
Coenegrachts, Bart
Issue
5_6
Journal
Microelectronics Reliability
Volume
45
Title
Implementation of high-k and metal gate materials for the 45nm node and beyond: gate patterning development
Publication type
Journal article
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