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Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM
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1931 since deposited on 2021-10-16
Acq. date: 2025-10-24
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Views
1931 since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations