Publication:

Continued scalability of copper/low-k interconnects

Date

2005
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Author(s)

Brongersma, Sywert  
;
Carbonell, Laure
;
Vanstreels, Kris  
;
Iacopi, Francesca
;
D'Haen, Jan  
;
Zhang, Wenqi
;
Travaly, Youssef
;
Demuynck, Steven  
;
Tokei, Zsolt  
;
De Ceuninck, Ward  
;
Maex, Karen  

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1993 since deposited on 2021-10-16
Acq. date: 2026-01-11

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1993 since deposited on 2021-10-16
Acq. date: 2026-01-11

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