Publication:
Improving the growth of HfO2 ALD layers by modifying growth parameters and reducing precursors contaminants
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1794 since deposited on 2021-10-16
3last month
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Acq. date: 2026-10-05
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Statistics
Views
1794 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-10-05
Citations