RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

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Authors

De Coster, Walter; Brijs, Bert; Bender, Hugo; Alay, Josep Lluis; Vandervorst, Wilfried

Issue

4

Journal

Vacuum

Volume

45

Title

RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

Publication type

Journal article

Embargo date

9999-12-31

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