Authors

Degraeve, Robin; Kauerauf, Thomas; Cho, Moon Ju; Zahid, Mohammed; Ragnarsson, Lars-Ake; Brunco, David; Kaczer, Ben; Roussel, Philippe; De Gendt, Stefan; Groeseneken, Guido

Conference

Technical Digest International Electronic Devices Meeting (IEDM)

Title

Degradation and breakdown of 0.9 nm EOT SiO2/ ALD HfO2/metal gate stacks under positive constant voltage stress

Publication type

Proceedings paper