Show simple item record

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:27Z
dc.date.available2021-09-29T12:40:27Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/103
dc.sourceIIOimport
dc.titleRBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage389
dc.source.endpage395
dc.source.journalVacuum
dc.source.issue4
dc.source.volume45
imec.availabilityPublished - imec
imec.internalnotesPaper from the 3rd Conference on Analysis by a Combination of Ion Beam (Accelerator-Based) and Surface Specific Techniques; April 1993; Namur, Belgium


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record