Show simple item record

RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:40:27Z
dc.date.available2021-09-29T12:40:27Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/103
dc.sourceIIOimport
dc.titleRBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage389
dc.source.endpage395
dc.source.journalVacuum
dc.source.issue4
dc.source.volume45
imec.availabilityPublished - open access
imec.internalnotesPaper from the 3rd Conference on Analysis by a Combination of Ion Beam (Accelerator-Based) and Surface Specific Techniques; April 1993; Namur, Belgium


Files in this item

Thumbnail
Name:
95.pdf
Size:
633.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record