Authors

Eneman, Geert; Simoen, Eddy; Delhougne, Romain; Gaubas, Eugenijus; Simons, Veerle; Roussel, Philippe; Verheyen, Peter; Lauwers, Anne; Loo, Roger; Vandervorst, Wilfried; De Meyer, Kristin; Claeys, Cor

Issue

22

Journal

Journal of Physics: Condensed Matter

Volume

17

Title

Defect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility transistors

Publication type

Journal article