Authors

Eneman, Geert; Simoen, Eddy; Delhougne, Romain; Verheyen, Peter; Ries, Michael; Loo, Roger; Caymax, Matty; Vandervorst, Wilfried; De Meyer, Kristin

Conference

Semiconductor Defect Engineering - Materials, Synthetic Structures, and Devices

Title

N+/P and P+/N junctions in strained Si on thin Strain Relaxed SiGe buffers: the effect of defect density and layer structure

Publication type

Proceedings paper