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TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge
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1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-09-19
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Statistics
Views
1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-09-19
Citations