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TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge
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1937 since deposited on 2021-10-16
2last month
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Acq. date: 2026-08-10
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Statistics
Views
1937 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-08-10
Citations