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TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge
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1933 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-01-09
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Metrics
Views
1933 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-01-09
Citations