Authors

Hellin, David; Rip, Jens; Delabie, Annelies; Bonzom, Renaud; De Gendt, Stefan; Vinckier, Chris

Conference

11th International Conference on Total Reflection X-Ray Fluorescence Spectrometry and Related Methods - TXRF

Title

TXRF layer analysis for advanced micro-electronic applications: a two case study, HfO2/Si and Si/Ge

Publication type

Meeting abstract

Embargo date

9999-12-31