Challenges in the implentation of low-k dielectrics in the back-end of line

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Authors
Hoofman, Romano; Brom - Verheyden, Greja; Michelon, Julien; Iacopi, Francesca; Travaly, Youssef; Baklanov, Mikhaïl; Tokei, Zsolt; Beyer, Gerald
Journal
Microelectronic Engineering
Volume
80
Title
Challenges in the implentation of low-k dielectrics in the back-end of line
Publication type
Journal article
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