Authors

Janssens, Tom; Kmieciak, Malgorzata; Kittl, Jorge; Fouchier, Marc; Lauwers, Anne; Kottantharayil, Anil; Vandervorst, Wilfried

Conference

USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors

Title

Dopant profiling in NixSi1-x gates with SIMS

Publication type

Proceedings paper