Authors

Kang, JinFeng; Yu, HongYu; Ren, C.; Yang, H.; Sa, N.; Liu, X.Y.; Han, R.Q.; Li, M.F.; Chan, D.S.H.; Kwong, D.L.

Conference

Proceedings of the 35th European Solid-State Device Research Conference - ESSDERC

Title

Scalability and reliability of TaN/HfN/HfO2 gate stack fabricated by a high temperature process

Publication type

Proceedings paper