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Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
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Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kluth, S.M.
;
Alvarez, C.
;
Trellenkamp, St.
;
Moers, J.
;
Mantl, S.
;
Kretz, J.
;
Vandervorst, Wilfried
Journal
Journal of Vacuum Science & Technology B
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1934
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1934
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations