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Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
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Authors
Kluth, S.M.
;
Alvarez, C.
;
Trellenkamp, St.
;
Moers, J.
;
Mantl, S.
;
Kretz, J.
;
Vandervorst, Wilfried
Issue
1
Journal
Journal of Vacuum Science & Technology B
Volume
23
Title
Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
Publication type
Journal article
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