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CMP-less integration of fully Ni-silicided metal gates in FinFETs by simultaneous silicidation of the source, drain, and the gate using a novel dual hard mask approach

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1914 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18

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Views

1914 since deposited on 2021-10-16
2last month
Acq. date: 2026-05-18

Citations