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CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
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1967 since deposited on 2021-10-16
1last month
Acq. date: 2026-10-12
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Statistics
Views
1967 since deposited on 2021-10-16
1last month
Acq. date: 2026-10-12
Citations