Publication:
CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
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1966 since deposited on 2021-10-16
3last month
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Acq. date: 2026-08-10
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Statistics
Views
1966 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-08-10
Citations