Publication:
Characteristics of selective epitaxial SiGe deposition processes for recesssed source/drain applications
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1914 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-08
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Metrics
Views
1914 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-08
Citations