Double patternig scheme for sub-0.25 k1 single damascene structures at NA=0.75, l=193nm

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Authors
Maenhoudt, Mireille; Versluijs, Janko; Struyf, Herbert; Van Olmen, Jan; Van Hove, Marleen
Conference
Optical Microlithography XVIII
Title
Double patternig scheme for sub-0.25 k1 single damascene structures at NA=0.75, l=193nm
Publication type
Proceedings paper
Embargo date
9999-12-31
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